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Price list

*Full-service prices for Commercial & Academic users**
	Valid from 1st July 2019
	Lithography	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
RAITH	E-beam writer RAITH150 Two	3 300	127	1 800	70
MIRA	Scanning Electron Microscope/E-beam writer TESCAN MIRA3	2 900	112	1 300	50
DWL	UV Direct Write Laser system Heidelberg Instruments DWL 66-fs	2 420	93	1 300	50
SUSS-MA8	Mask Aligner, NanoImprint Lithography SÜSS MicroTec MA8/BA8 Gen3	3 370	130	1 300	50
SUSS-WETBENCH	Lithographic wetbench for resist coating SÜSS MicroTec	2 950	113	1 300	50
SUSS-RCD8	Resist coating and development system SÜSS MicroTec RCD8	2 760	106	1 300	50
LAURELL	Spincoater Laurell WS-650-23B	2 950	113	900	35
NANOCALC	Spectroscopic reflectometer Ocean Optics NanoCalc 2000	2 270	87	900	35
DEKTAK	Mechanical profilometer Bruker Dektak XT	2 490	96	1 300	50
DIENER	Resist stripper Diener electronic NANO Plasma cleaner	2 300	88	1 300	50

	Depositions and etching	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
EVAPORATOR	Electron beam evaporator BESTEC	3 650**	140**	1 300**	50**
MAGNETRON	Magnetron sputtering system BESTEC	3 240**	125**	1 300**	50**
ALD	Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200	3 080	118	1 300	50
XERION	Rapid thermal annealing Xerion XREACT/1 250°C	2 660	102	900	35
XEF2	XeF2 etching system	2 300	88	1 300	50
PARYLENE	SCS Parylene Deposition System	2 300	88	1 300	50
PECVD-NANOFAB	High-temperature PECVD of C-based materials Oxford Instruments Plasma Technology NanoFab	3 390	130	1 300	50
Experimental-PECVD	PECVD with ion and mass analyzer, optical emission spectroscopy, in situ ellipsometry, langmuir probe	3 780	145	1 300	50
APCVD	Atmospheric Pressure chemical vapor deposition	2 930	113	1 300	50
LPCVD	Low-pressure chemical vapor deposition	2 930	113	1 300	50
MOCVD	Metal-organic chemical vapor deposition	3 280	126	1 300	50
PECVD	PECVD of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100	3 780	145	1 300	50
DRIE	Deep reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 100	3 330	128	1 300	50
SCIA	Ion beam etching Scia Systems Coat 200	3 450	133	1 300	50
RIE-CHLORINE	Reactive ion etching of III-V semiconductors Oxford Instruments Plasma Technology PlasmaPro 100	2 780	107	1 300	50
RIE-FLUORINE	RIE of Si-based materials/deposition of thin films Oxford Instruments PlasmaPro NGP 80	3 610	139	1 300	50

	Packaging	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
WIRE-BONDER	Wire bonder TPT HB 16	2 230	86	900	35
LASER-DICER	Laser dicer Oxford Lasers A-Series	2 600	100	900	35
DICING-SAW	Semiautomatic dicing saw ESEC 8003	2 600	100	900	35

	UHV Technologies	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
SIMS	Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5	4 200	162	1 800	70
KRATOS-XPS	X-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra	4 200	162	1 800	70
NANOSAM	nanoScanning Auger Microscopy Scienta Omicron nanoSAM Lab	4 200	162	1 800	70
UHV-CLUSTER	Ultra-High Vacuum Preparation and Analytical System - Custom Deposition Chamber SPECS	2 900	112	1 800	70

	Microscopy and nanomanipulation	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
LYRA	Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3	3 600	138	1 300	50
MIRA3-XMU	Scanning electron microscope (SEM) MIRA3 XMU	2 900	112	1 300	50
ICON-SPM	Scanning Probe Microscope Bruker Dimension Icon	3 120	120	1 300	50
RAMAN	Witec Alpha 300R	3 120	120	1 300	50
NANOSCAN	NanoScan VLS-80	3 120	120	1 300	50
KERR-MICROSCOPE	Magneto-optical Kerr microscope	2 690	103	900	35
NANOINDENTOR	Hysitron TI 950	3 300	127	1 300	50

	Optical measurements	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
FTIR	Vacuum FTIR Vertex80v + microscope Hyperion 3000 KIT	3 650	140	1 300	50
WOOLLAM-VIS	NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE	2 700	104	900	35
WOOLLAM-MIR	MIR spectroscopic ellipsometer J. A. Woollam IR-VASE	2 830	109	1 300	50
VUVAS	Vacuum ultraviolet spectrometer McPherson VUVAS 1000	2 510	97	1 300	50
NIRQUEST512	NIR Optical Spectrometer Ocean Optics NIRQuest 512	2 460	95	900	35
JAZ3	UV-VIS Optical Spectrometer Ocean Optics JAZ 3-channel	2 460	95	900	35
SNOM-NANONICS	Scanning Near-field Optical Microscopy Nanonics Imaging MV 4000	3 370	130	1 300	50
TERS	Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II	3 190	123	1 300	50

	Electrical and magnetic measurements	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
SUMMIT	Semi-automated 4-probe system Cascade Microtech SUMMIT 12000	3 120	120	1 300	50
MPS150	4-probe station Cascade Microtech MPS 150	2 310	89	900	35
KEITHLEY	Keithley 4200-SCS Parameter Analyzer	2 310	89	900	35
VERSALAB	Cryogenic-free VSM and ETO measurement system – Quantum Design, VersaLab	2 460	95	900	35
LAKESHORE	Low-Temperature Electro-Magnetic Properties Measurement System LakeShore CRX-EM-HF	3 080	118	1 300	50
CRYOGENIC	Low-Temperature Vibrating Sample Magnetometer Cryogenic Limited	3 220	124	1 300	50

	Electron microscopy	Commercial CZK/hour	EUR/hour	CZK/hour	EUR/hour
TITAN	High resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed	6 100	235	2 300	88
HELIOS	Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660	4 200	162	1 800	70
VERIOS	High-resolution Scanning Electron Microscope FEI Verios 460L	3 600	138	1 800	70

	Sample preparation	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
STEMI	Stereomicroscope Zeiss Stemi 508	1 900	73	900	35
TENUPOL	TEM electrolytic polisher Tenupol 5	2 260	87	900	35
FISCHIONE-160	TEM specimen grinding tool Fischione 160	1 960	75	900	35
FISCHIONE-170	Ultrasonic TEM disc cutter Fischione 170	2 060	79	900	35
CITOVAC	Vacuum impregnation chamber Citovac	1 970	76	900	35
LEICACOAT-STAN	Coater Leica EM ACE600	2 220	85	900	35
TXP	Target surfacing system Leica TXP	1 900	73	900	35
TIC3X	Cross-section/broad beam ion polisher Leica EM TIC3X	2 670	103	900	35
FISCHIONE-200	Dimple grinder Fichione 200	1 970	76	900	35
LECTROPOL	Electrolytic polisher Lectropol 5	2 180	84	900	35
TEGRAMIN	Grinder/polisher Tegramin 30	2 210	86	900	35
ZEISS-Z1M	Inverted light microscope Zeiss Axio Observer Z1m	2 070	80	900	35
FISCHIONE-TEM MILL	Ion polisher Fischione TEM Mill 1050	2 870	110	900	35
LABOTOM5	Metallographic saw Labotom 5	2 270	87	900	35
CITOPRESS	Mounting press Citopress 10	1 930	74	900	35
PLASMACLEANER	Plasma cleaner Fischione 1020	2 360	91	900	35
SAW-ACCUTOM	Precision saw Accutom 100	2 320	89	900	35
LEICACOAT-NANO	High vacuum coating system for electron microscopy Leica Microsystems EM ACE 600	2 220	85	900	35

	X-ray diffractometry	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
RIGAKU9	X-ray diffractometer with high brightness source Rigaku SmartLab 9kW	3 260	125	1 300	50
RIGAKU3	X-ray powder diffractometer Rigaku SmartLab 3kW	2 900	112	1 300	50

	X-ray CT	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
microCT	microCT GE phoenix v\|tome\|x L240	4 050	156	3 300	126
nanoCT	nanoCT Rigaku nano3DX	2 900	112	2 412	92

	LIBS	Commercial CZK/hour	EUR/hour	Academic CZK/hour	EUR/hour
LIBS	Laser-Induced Breakdown Spectroscopy	2 800	108	2 300	88

* Prices without VAT
** Au/Pt – 15 CZK/nm (EVAPORATOR, MAGNETRON)
Prices in EUR are approximate at the rate of 26 CZK = 1 EUR

Price list

**Full-service prices* for Commercial & Academic users**

Lithography

Depositions and etching

Packaging

UHV Technologies

Microscopy and nanomanipulation

Optical measurements

Electrical and magnetic measurements

Electron microscopy

Sample preparation

X-ray diffractometry

X-ray CT

LIBS

Research

Services

People

Education

Jobs

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