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CzechNanoLab Research Infrastructure

Brno University of Technology
Institute of Physics, CAS
Masaryk University

 


 

Devices

Research Topics and Expertise

Laboratories and Equipment

Research Topics and Expertise

Electronics


Spin transport in 2D electron gas structures







Sci. Rep. 6 (2016) 22901(1) - 22901(8) https://www.nature.com/articles/srep22901

Equipment used:  XXXX, XXXX, XXXX (LNSM)

Mode of user access:  Proposal based full service, Internal project


Electric-field tuning of THz radiation

J. Phys. D-Appl. Phys. 51 (2018) 054001(1) - 054001(5). https://iopscience.iop.org/article/10.1088/1361-6463/aaa315

Equipment used:   XXXX, XXXX, XXXX (LNSM)

Mode of user access:   Proposal based full service, Internal project


Graphene doping by electron beam

Nanoscale 10, (2018), 17520. https://doi.org/10.1039/C8NR06483K

Equipment used:  ALD, DIENER, DWL, EVAPORATOR (CEITEC Nano)

Mode of user access:  Self service, (RG J. Čechal, CEITEC)  

Optoelectronics


Diamond Photonic Crystals


ACS Nano 11 (2017) 2972 - 2981 https://pubs.acs.org/doi/10.1021/acsnano.6b08412

Equipment used:  XXXX, XXXX, XXXX (LNSM)

Mode of user access:  Proposal based full service, Internal project

Spintronics


Ultra-fast Antiferromagnetic Memories

Science Advances 4 (2018) eaar3566(1) https://advances.sciencemag.org/content/4/3/eaar3566

Equipment used:  XXXX, XXXX, XXXX (LNSM, RG T. Jungwirth)

Mode of user access:  Proposal based full service, Internal project

​

Electrical switching of antiferromagnet

Science 351 (2016) 587 - 590 https://science.sciencemag.org/content/351/6273/587.abstract

Equipment used:  XXXX, XXXX, XXXX (LNSM, RG T. Jungwirth)

Mode of user access:  Proposal based full service, Internal project


Reversal and detection of Néel vector in antiferromagnet

Nat. Commun. 9 (2018) 4686(1) - 4686(8) https://www.nature.com/articles/s41467-018-07092-2

Equipment used:  XXXX, XXXX, XXXX (LNSM, RG T. Jungwirth)

Mode of user access:  Proposal based full service, Internal project

ICT


Antiferromagnetic memory with microelectronic compatibility

Nat. Commun. 8 (2017) 15434(1) - 15434(7) https://www.nature.com/articles/ncomms15434 

Equipment used:  XXXX, XXXX, XXXX (LNSM, RG T. Jungwirth)

Mode of user access:  Proposal based full service, Internal project


Memristive memories

Adv. Funct. Mater. 2017, 27, 1700384. http://dx.doi.org/10.1002/adfm.201700384

Equipment used: ALD, EVAPORATOR, DWL (CEITEC Nano)

Mode of user access: Academic full service (RG M. Lanza, Soochow University, China)


Sensors/transducers


Electrical detection of magnetization reversal


Phys. Rev. B 91 (2015) 180402(R)(1) - 180402(R)(5) https://journals.aps.org/prb/abstract/10.1103/PhysRevB.91.180402

Equipment used:  XXXX, XXXX, XXXX (LNSM, RG T. Jungwirth)

Mode of user access:  Proposal based full service, Internal project


Selectively arranged single-wire based nanosensor array systems for gas monitoring

Nanoscale 2018, 10, 9087. http://dx.doi.org/10.1039/C8NR01588K 

Equipment used: RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3

Mode of user access: Self service (RG J. Hubálek)


Gravimetrical sensors

MEMS

Equipment used:  XXXX, XXXX, XXXX (CEITEC)

Mode of user access:  Self service (RG J. Hubálek, CEITEC)


Gas/humidity sensors

Electrical - Graphene FET


Nanotechnology 28 (2017) 415203, https://doi.org/10.1088/1361-6528/aa86a4

Equipment used:  MIRA3, DWL, EVAPORATOR (CEITEC)

Mode of user access: Self-service (RG J. T. Šikola, CEITEC)


Nanowire-based chemoresistive receptor


Nanoscale 10 (2018), 9087-9096, https://doi.org/10.1039/c8nr01588k

Equipment used:  EBL Raith150, DWL, Magnetron sputtering, Ion beam sputtering, RIE, IBE SCIA system, AACVD, XRD, XPS, SEM, (CEITEC)

Mode of user access: Self service (RG J. Hubálek, CEITEC)


Hexagonal rod-based nanostructures for gas sensing


Sensors and Actuators B 268 (2018) 15–21, https://doi.org/10.1016/j.snb.2018.04.033

Equipment used:  AACVD, XRD, XPS, HRTEM, (CEITEC)

Mode of user access: Self service (RG J. Hubálek, CEITEC)


Cryo micro-manipulators

MEMS

Equipment used:  DWL, DRIE (CEITEC)

Mode of user access:  Self service, Contractual research (RG J. T. Šikola, CEITEC)

Microfluidics


Channels in silicon technology

Buried channels

Microfluidics and Nanofluidics 22 (2018) 105, https://doi.org/10.1007/s10404-018-2125-6

Equipment used:  DWL, MA8, RCD8, DRIE, DIENER, PARYLENE (CEITEC)

Mode of user access:  Self service (RG J. Hubálek, CEITEC)

Biosensors


Immunosensors

Electrochemical

Equipment used:  XXXX, XXXX, XXXX (CEITEC)

Mode of user access:  Self service (RG J. Hubálek, CEITEC)


Enzyme-based sensors

Electrochemical

Equipment used:  XXXX, XXXX, XXXX (CEITEC)

Mode of user access:  Self service (RG J. Hubálek, CEITEC)


Optical biosensors

Photonic - (Integrated IR cascade laser)

Equipment used:  XXXX, XXXX, XXXX (CEITEC)

Mode of user access:  Self service (RG H. Detz, CEITEC) 


Sensors based on CuO/ZnO NPs

Photonic - Optical (Mie's resonances)

Colloids Surf B Biointerfaces, 2014 Nov 1;123:951-8.

https://doi.org/10.1016/j.colsurfb.2014.10.051

Equipment used:  LYRA, RIGAKU 3, JAZ3-CHANNEL (CEITEC)

Mode of user access: Self-service (RG T. Šikola, CEITEC)


The platform for nanopore membrane sensing

Plasmonic device

Microelectronic Engineering, Volume 228, 1 May 2020, 111326, https://doi.org/10.1016/j.mee.2020.111326

Equipment used:  MIRA3, RAITH, RIE-FLUORINE, RIE-CHLORINE EVAPORATOR(CEITEC)

Mode of user access: Self-service (RG T. Šikola, CEITEC) 

Energy harvesting


Solar cells on patterned structures

​

phys. status solidi a 212 (2015) 1823 - 1829 https://onlinelibrary.wiley.com/doi/full/10.1002/pssa.201431869 

Equipment used:  XXXX, XXXX, XXXX (LNSM)

Mode of user access:  Self service (RG M. Vaněček, LNSM) 


Piezo-resonant based devices

MEMS

Equipment used:  XXXX, XXXX, XXXX (CEITEC)


Mode of user access:  Self service (RG J. Hubálek, CEITEC) 

Integrated planar optics


Diffraction optics

Metasurfaces

Contractual research

Equipment used:  RAITH, DRIE, SCIA, RIE-FLUORINE, RIE-CHLORINE, PECVD, ALD, EVAPORATOR (CEITEC)

Mode of user access:  Self service (RG T. Šikola, CEITEC) 


Beam-phase-profile forming lenses

Metasurfaces

 ACS Photonics 2017, 4, 1389., http://dx.doi.org/10.1021/acsphotonics.7b00022

Equipment used:  MIRA, LYRA, EVAPORATOR (CEITEC)

Mode of user access:  Self service (RG T. Šikola, CEITEC) 

Laboratories and Equipment

Lithography


E-beam writer RAITH150 Two (RAITH)

Methods:   sub-10 nm e-beam lithography 

Location:  CEITEC

Guarantor:  Meena Dhankhar

Modes of access:  Paid full service, Proposal full service, Self-service


Electron beam writer Raith eLine (RAITHELINE)

Methods:   Electron lithography 

Location:  LNSM

Guarantor: Kamil Olejník

Modes of access: Free full-service


SEM/Electron beam writer Tescan Mira3/Raith LIS (MIRA)

Methods:   sub-50 nm e-beam lithography 

Location:  CEITEC

Guarantor:  Vojtěch Švarc

Modes of access:  Paid full service, Proposal full service, Self-service


Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3 (LYRA)

Methods:   sub 10-nm focused ion beam milling/irradiation, FEBID, FIBID, basic electron beam lithography

Location:  CEITEC

Guarantor:  Tomáš Šamořil

Modes of access:  Paid full service, Proposal full service, Self-service


UV Direct Write Laser system HEIDELBERG DWL 66-fs (DWL)

Methods:   sub 2-micrometer laser scanning lithography, maskmaking

Location:  CEITEC

Guarantor:  Erik Pálesch

Modes of access:  Paid full service, Proposal full service, Self-service


Optical mask aligner unit (MASKALIGNER)

Methods:  Optical lithography, UV lithography, contact

Location:  LNSM

Guarantor:  Kamil Olejník

Modes of access: Free full-service


Mask Aligner SÜSS MicroTec MA8 (SUSS-MA8)

Methods:   soft, hard, proximity UV lithography, nanoimprint lithography

Location:  CEITEC

Guarantor:  Vojtěch Švarc

Modes of access:  Paid full service, Proposal full service, Self-service


Ellipsometer SpecEl - 2000-UV/VIS/NIR (ELLIPS-SPECEL)

         

         Methods:   Ellipsometry

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Cryostat ARS CS202PI-DMX-3 (CRYO-ARS)

         ​

         Methods:   Temperature dependences

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Electromagnet GMW 3472-70 (ELM-3472-70)

         

         Methods:   Magnetotransport

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Parametric Device Analyzer Agilent B1500A (DEVANAGILENT)

         

         Methods:   Electrical characterisation

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Network Analyzer Rohde&Schwarz ZVA50 (NARS-ZVA50)

         

         Methods:   Ferromagnetic resonance

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Oscilloscope Rohde&Schwarz RTP064 (OSCILLRSRTP064)

         

         Methods:   Ultrashort electrical pulse experiments

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Subnanosecond pulse generator Kentech Instruments RTV30 (SUB-NSPULSERRTV30)

         ​

         Methods:   Ultrashort electrical pulse experiments

         Location:  LNSM

         Guarantor:  Kamil Olejník

         Modes of access:  Free full-service


Photolithographic system (FOSY)

         ​

         Methods:   Optical photolithography

         Location:  LNSM

         Guarantor:  Stěpán Stehlík

       Modes of access:  Full-service


Spin Coater 

Methods:   

Location:  LNSM

Guarantor:  ????

Modes of access:  Self-service


Resist coating and development system SÜSS MicroTec RCD8 (SUSS-RCD8)

Methods:  semi-automated spin coating and resist development

Location:  CEITEC

Guarantor:  Radim Hrdý

Modes of access:  Paid full service, Proposal full service, Self-service


Lithographic wetbench for coating (SUSS-WETBENCH)

Methods:   manual spin coating, two hotplates, vapor primer (HDMS)

Location:  CEITEC

Guarantor:  Erik Pálesch

Modes of access:  Paid full service, Proposal full service, Self-service


Spincoater Laurell WS-650-23B (LAURELL)

Methods:   manual spin coating

Location:  CEITEC

Guarantor:  Vojtěch Švarc

Modes of access:  Paid full service, Proposal full service, Self-service


Resist stripper Diener NANO Plasma cleaner  (DIENER)


Plasma Diener

Methods:   

Location:  LNSM

Guarantor:  ????

Modes of access:  Self-service


Critical Point Dryer – Tousimis Autosamdri-815B  (CPD-Autosamdri-815D)

Methods:   Critical point drying for wafer and MEMS

Location:  CEITEC

Guarantor:  Jiří Zita

Modes of access:  Paid full service, Proposal full service, Self-service


Veeco Dektak Profiler (DEKTAK150)

​

Methods:  Surface topography profiling

Location:  LNSM

Guarantor:  Kamil Olejník

Modes of access:  Free full-service


Mechanical profilometer Bruker Dektak XT  (DEKTAK)

Methods:   thin film and step height measurement

Location:  CEITEC

Guarantor:  Meena Dhankhar

Modes of access:  Paid full service, Proposal full service, Self-service


Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)

Methods: Resist thickness measurement mainly. Film thickness from 10 nm up to 100 µm.

Location:  CEITEC

Guarantor:  Vojtěch Švarc

Modes of access:  Paid full service, Proposal full service, Self-service


Optical microscope Zeiss Axio Imager A2 (ZEISS-A2)


Etching and depositions


Deep reactive ion etching of Si-based materials, Oxford Instruments Plasma Technology PlasmaPro 100 (DRIE)

Methods:   Si DRIE

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service



Ion beam etching Scia Systems Coat 200  (SCIA)

Methods:   Ion beam milling, SIMS endpoint detection

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service


RIE by Fluorine Chemistry and PECVD of hard C-based films, Oxford PlasmaPro NGP 80 (RIE-FLUORINE)

Methods:   etching of Si, SiO2, Si3N4, TiO2, Au, Nb and deposition of DLC and CN films

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service


RIE by Chlorine Chemistry, Oxford Instruments Plasma Technology PlasmaPro 100 (RIE-CHLORINE)

Methods:   chlorine-based etching

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service


Oxford Instruments Plasmalab 100 (RIEPL100)

​

Methods:   Reactive plasma etching

Location:  LNSM

Guarantor:  Kamil Olejník

Modes of access:  Self-service


XeF2 etching system (XeF2)

Methods:   Isotropic Si etching

Location:  CEITEC

Guarantor:  Jan Prášek

Modes of access:  Paid full service, Proposal full service, Self-service


Magnetron sputtering system BESTEC  (MAGNETRON)

Methods:  Deposition of Ag, Al, Au, Bi, C, Co, Cr, Cu, Gd, Fe, Hf, Mo, Mn, Nb, Ni, Pt, Ru, Si, Sb, Sc, Ta, Ti, W, Zr, TiN, TiO2, AlCuSi, NiCr, Ni80Fe20, Ir20Mn80, Fe75Co25, Fe50Rh50, Al2O3, SiO2, Co20Fe60B20

Location:  CEITEC

Guarantor:  Jan Prášek

Modes of access:  Paid full service, Proposal full service, Self-service


E lectron beam evaporator BESTEC (EVAPORATOR)

Methods:   Evaporation of W, Ta, VO2, SiO2, Au, Ti, Cr, Co, Cu, Ni, Fe, Cr2O3, Ag, Al, NiFe, NiCr

Location:  CEITEC

Guarantor:  Jan Prášek

Modes of access:  Paid full service, Proposal full service, Self-service


Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)

Methods:   Ion beam assisted deposition of Ti, Al, W, Hf, Ta, Zr

Location:  CEITEC

Guarantor:  Imrich Gablech

Modes of access:  Paid full service, Proposal full service, Self-service


Covap Deposition Chamber ()

Methods:   ??

Location:  LNSM ()

Guarantor: 

Modes of access:  Self-service


Atomic layer deposition system, Ultratech/CambridgeNanoTech Fiji 200 (ALD)

Methods:   La2O3, Al2O3, HfO2, TiO2, SiO2, TiN, AlN

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service


High-temperature plasma-enhanced chemical vapour deposition system on C-based materials, Oxford Instruments Plasma Technology NanoFab (PECVD-NANOFAB)

Methods:   deposition of carbon nanotubes and graphene

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service


Plasma Enhanced CVD of Si-based materials, Oxford Instruments Plasma Technology PlasmaPro 100 (PECVD)

Methods:   SiN and a-Si deposition

Location:  CEITEC

Guarantor:  Marek Eliáš

Modes of access:  Paid full service, Proposal full service, Self-service


Atmospheric Pressure chemical vapor deposition (APCVD)

Methods:   SiO2 deposition

Location:  CEITEC

Guarantor:  Filip Munz

Modes of access:  Paid full service, Proposal full service, Self-service


Low-Pressure chemical vapor deposition – amorphous Si (LPCVD-polySi)

Methods:   amorphous silicon deposition

Location:  CEITEC

Guarantor:  Filip Munz

Modes of access:  Paid full service, Proposal full service, Self-service


Low-Pressure chemical vapor deposition – Si nitrides (LPCVD-SiN)

Methods:   SixNy deposition

Location:  CEITEC

Guarantor:  Filip Munz

Modes of access:  Paid full service, Proposal full service, Self-service


Metal-organic chemical vapor deposition (MOCVD)

 


Methods:   TiO2, Fe2O3, BaTiO3, PbZrTiO3, HfO2

Location:  CEITEC

Guarantor:  Filip Munz

Modes of access:  Paid full service, Proposal full service, Self-service


SCS Parylene Deposition System (PARYLENE)

Methods:   Application of SCS Parylene conformal coatings

Location:  CEITEC

Guarantor:  Jan Prášek

Modes of access:  Paid full service, Proposal full service, Self-service


PCCE Flowboxes

2.2 - navrhuju spojit 2.2 chips a 2.3 PCB na 2.2 Chips & PCBs

Wire bonder K&S

2.4 DC/AC electrical testing Standard DC and AC characterisation tools (multimeters, lock-in amplifiers, …) Short pulse and high frequency equipment (RTV 30 sub-ns pulse generator, R&S RTP64 20GSa/s Oscilloscope, R&S ZVA 50GHZ Vector Network Analyzer

PCCE Flowboxes

2.2 - navrhuju spojit 2.2 chips a 2.3 PCB na 2.2 Chips & PCBs

Wire bonder K&S

2.4 DC/AC electrical testing Standard DC and AC characterisation tools (multimeters, lock-in amplifiers, …) Short pulse and high frequency equipment (RTV 30 sub-ns pulse generator, R&S RTP64 20GSa/s Oscilloscope, R&S ZVA 50GHZ Vector Network Analyzer)

​Packaging

Wire bonder TPT HB 16 (WIRE-BONDER)

Wire bonder TPT HB 16

Methods: wedge-wedge, ball-wedge, ribbon and bump bonding class

Location:  CEITEC

Guarantor: Marek Vaňatka

Modes of access:  Paid full service, Proposal full service, Self-service


Laser dicer Oxford Lasers A-Series (LASER-DICER)

Laser dicer Oxford Lasers A-Series

Methods: Laser class 1

Location:  CEITEC

Guarantor: Jakub Sadílek

Modes of access:  Paid full service, Proposal full service, Self-service


Semiautomatic dicing saw ESEC 8003 (DICING-SAW)

Semiautomatic dicing saw ESEC 8003

Methods:  

Location:  CEITEC

Guarantor:  Radovan Klusák

Modes of access:  Paid full service, Proposal full service

Testing


4-probe station Cascade Microtech MPS 150 (MPS150)

 

Laser dicer Oxford Lasers A-Series

Methods:

Location:  CEITEC

Guarantor: Radim Hrdý

Modes of access:  Paid full service, Proposal full service, Self-service


Keithley 4200-SCS Parameter Analyzer (KEITHLEY-4200)

Semiautomatic dicing saw ESEC 8003

Methods:  

Location:  CEITEC

Guarantor:   Radim Hrdý

Modes of access:  Paid full service, Proposal full service, Self-service


Semi-automated 4-probe system Cascade Microtech SUMMIT 12000 (SUMMIT)

Semiautomatic dicing saw ESEC 8003

Methods:  

Location:  CEITEC

Guarantor:   Radim Hrdý

Modes of access:  Paid full service, Proposal full service, Self-service


High-frequency MPI probe station for vector network analysis (VNA-MPI)

Semiautomatic dicing saw ESEC 8003

Methods:  

Location:  CEITEC

Guarantor:   Michal Urbánek

Modes of access:  Paid full service, Proposal full service, Self-service




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